ASML sketches a chip tool that could guard its monopoly for a decade

ASML Holding N.V. (ASML) and optics partner Zeiss published a paper on a next machine, Hyper NA, that could print circuits a third smaller than today's best while reusing much of the current gear. It is not committed to production and sits about a decade out. ASML already dominates this equipment, a draw for holders like Pat Dorsey.

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